The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Sep. 19, 2014
Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventors:

Naho Mizuhara, Itami, JP;

Koji Uematsu, Itami, JP;

Michimasa Miyanaga, Itami, JP;

Keisuke Tanizaki, Itami, JP;

Hideaki Nakahata, Itami, JP;

Seiji Nakahata, Itami, JP;

Takuji Okahisa, Itami, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/04 (2006.01); H01L 29/20 (2006.01); C30B 9/12 (2006.01); C30B 19/02 (2006.01); C30B 23/02 (2006.01); C30B 25/20 (2006.01); C30B 29/40 (2006.01); H01L 21/02 (2006.01); C30B 25/18 (2006.01);
U.S. Cl.
CPC ...
H01L 29/045 (2013.01); H01L 29/2003 (2013.01); C30B 25/18 (2013.01); C30B 9/12 (2013.01); C30B 19/02 (2013.01); C30B 23/025 (2013.01); C30B 25/20 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/02389 (2013.01); H01L 21/02433 (2013.01); H01L 21/0254 (2013.01); H01L 21/02658 (2013.01);
Abstract

Group-III nitride crystal composites made up of especially processed crystal slices, cut from III-nitride bulk crystal, whose major surfaces are of {1-10±2}, {11-2±2}, {20-2±1} or {22-4±1} orientation, disposed adjoining each other sideways with the major-surface side of each slice facing up, and III-nitride crystal epitaxially present on the major surfaces of the adjoining slices, with the III-nitride crystal containing, as principal impurities, either silicon atoms or oxygen atoms. With x-ray diffraction FWHMs being measured along an axis defined by a <0001> direction of the substrate projected onto either of the major surfaces, FWHM peak regions are present at intervals of 3 to 5 mm width. Also, with threading dislocation density being measured along a <0001> direction of the III-nitride crystal substrate, threading-dislocation-density peak regions are present at the 3 to 5 mm intervals.


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