The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Apr. 04, 2013
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Kenji Nomura, Atsugi, JP;
FUJITSU LIMITED, Kawasaki, JP;
Abstract
An X-ray analysis apparatus includes: an X-ray source that emits an X-ray irradiating a specimen; a specimen holding unit that holds the specimen; and an X-ray detecting unit that detects the X-ray diffracted by the specimen; wherein the specimen holding unit includes a second φ-axis rotating stage rotating the specimen about a φ-axis, a first φ-axis rotating stage rotating the entirety of the second φ-axis rotating stage about the φ-axis, the second φ-axis rotating stage being disposed on the first φ-axis rotating stage, a φ-axis rotating stage that rotates the entirety of the first φ-axis rotating stage about a φ-axis, an ω-axis rotating stage that rotates the entirety of the χ-axis rotating stage about an ω-axis, and a 2θ-axis rotating stage rotating the X-ray detecting unit about the 2θ-axis, wherein the second φ-axis rotating stage unit rotates at a speed higher than that of the first φ-axis rotating stage.