The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Jan. 27, 2010
Toshiyuki Nakagawa, Kobe, JP;
Takamitsu Shigemoto, Urayasu, JP;
Yoshio Uetake, Tsukubamirai, JP;
Masahiro Kimoto, Tsukuba, JP;
Tetsuro Shigeno, Itami, JP;
Masaaki Muro, Itami, JP;
Naoyuki Nakamoto, Himeji, JP;
Toshiyuki Nakagawa, Kobe, JP;
Takamitsu Shigemoto, Urayasu, JP;
Yoshio Uetake, Tsukubamirai, JP;
Masahiro Kimoto, Tsukuba, JP;
Tetsuro Shigeno, Itami, JP;
Masaaki Muro, Itami, JP;
Naoyuki Nakamoto, Himeji, JP;
Abstract
Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.