The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Mar. 24, 2010
Applicants:
Scott Wayne Priddy, Saint Louis Park, MN (US);
Chad Michael Conroy, Stillwater, MN (US);
Inventors:
Scott Wayne Priddy, Saint Louis Park, MN (US);
Chad Michael Conroy, Stillwater, MN (US);
Assignee:
Veeco Instruments, Inc., Plainview, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 14/24 (2006.01); C23C 14/06 (2006.01);
U.S. Cl.
CPC ...
C23C 14/243 (2013.01); C23C 14/0623 (2013.01); Y02E 10/52 (2013.01);
Abstract
The present invention provides deposition sources, systems, and related methods that can efficiently and controllably provide vaporized material for deposition of thin-film materials. The deposition sources, systems and related methods described herein can be used to deposit any desired material and are particularly useful for depositing high vapor pressure materials such as selenium in the manufacture of copper indium gallium diselenide based photovoltaic devices.