The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Jun. 05, 2013
Applicant:
Yuegang Zhang, Cupertino, CA (US);
Inventor:
Yuegang Zhang, Cupertino, CA (US);
Assignee:
The Regents of the University of California, Oakland, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); C01B 31/02 (2006.01); B82Y 30/00 (2011.01); C01B 31/04 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
C01B 31/0213 (2013.01); Y10S 977/891 (2013.01); Y10S 977/734 (2013.01); B82Y 30/00 (2013.01); Y10T 428/24802 (2015.01); Y10T 428/26 (2015.01); C01B 31/0453 (2013.01); C01B 2204/06 (2013.01); B82Y 40/00 (2013.01);
Abstract
Methods of fabricating graphene nanoribbons include depositing a catalyst layer on a substrate. A masking layer is deposited on the catalyst layer. The masking layer and the catalyst layer are etched to form a structure on the substrate, the structure comprising a portion of the catalyst layer and a portion of the masking layer disposed on the catalyst layer, with sidewalls of the catalyst layer being exposed. A graphene layer is formed on a sidewall of the catalyst layer with a carbon-containing gas.