The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Dec. 21, 2010
Philippe Robert, Grenoble, FR;
Arnaud Walther, Grenoble, FR;
Philippe Robert, Grenoble, FR;
Arnaud Walther, Grenoble, FR;
Abstract
A process for producing a micromechanical structure including a substrate and a stack of at least two layers arranged on the substrate is provided. A mobile part is formed in the stack and a fixed part relative to the substrate is formed in the stack, and an opposite surface is formed between the fixed part and the mobile part, to present a stop device to limit displacement of the mobile part in a direction substantially perpendicular to the stack. The process uses at least one sacrificial layer between the substrate and the stack made of material suitable to be etched selectively relative to the materials of the stack.