The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2015

Filed:

Nov. 03, 2010
Applicants:

Jong Hyun Yoo, Milpitas, CA (US);

Alexander A. Bol'shakov, Los Altos, CA (US);

Inventors:

Jong Hyun Yoo, Milpitas, CA (US);

Alexander A. Bol'shakov, Los Altos, CA (US);

Assignee:

Applied Spectra, Inc., Fremont, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/03 (2006.01); G01N 27/00 (2006.01); B23K 26/06 (2014.01); B23K 26/38 (2014.01);
U.S. Cl.
CPC ...
B23K 26/032 (2013.01); G01N 27/00 (2013.01); B23K 26/0635 (2013.01); B23K 26/38 (2013.01);
Abstract

A method for real-time optical diagnostics in laser ablation and laser processing of layered or structured materials or material structures. Diagnostics is provided during laser ablation that is utilized regularly in laser processing and/or chemical analysis of structured materials, by means of measuring optical emission generated as a result of the pulsed laser-material interaction in real time. The method can involve a single-layer-film or a stack of multiple layers or a structure of different domains. The method is particularly beneficial in fabrication of thin-film structures, such as photovoltaic and electronic devices or circuits of devices.


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