The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Jun. 05, 2012
Yewen Wang, Guangdong, CN;
Yewen Wang, Guangdong, CN;
Shenzhen China Star Optoelectronics Technology Co., Ltd., Shenzhen, Guangdong Province, CN;
Abstract
The present invention relates to an improved laser annealing device, which includes a laser beam, a housing, a laser beam output window formed in a top of the housing, a substrate located at a bottom of the housing for carrying a material to be annealed, and a movable mask arranged between the laser beam output window and the substrate. The mask is set in inclination with respect to a horizontal direction. The mask forms a slit extending through upper and lower surfaces thereof. The laser beam travels vertically down through the laser beam output window and then passes through the slit to irradiate the substrate. The improved laser annealing device of the present invention includes a mask set in inclination with respect to the horizontal direction to prevent scraps from affecting the laser head, reduce replacement of the laser head, and lower down the cost.