The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Sep. 08, 2013
Applicants:
Scott M. Zimmerman, Basking Ridge, NJ (US);
Karl W. Beeson, Princeton, NJ (US);
William R. Livesay, San Diego, CA (US);
Richard L. Ross, Del Mar, CA (US);
Inventors:
Scott M. Zimmerman, Basking Ridge, NJ (US);
Karl W. Beeson, Princeton, NJ (US);
William R. Livesay, San Diego, CA (US);
Richard L. Ross, Del Mar, CA (US);
Assignee:
Goldeneye, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/20 (2006.01); H01L 29/20 (2006.01); H01L 31/0392 (2006.01); H01L 31/18 (2006.01); H01L 33/32 (2010.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/0254 (2013.01); H01L 21/2007 (2013.01); H01L 29/2003 (2013.01); H01L 31/0392 (2013.01); H01L 31/1836 (2013.01); H01L 31/1852 (2013.01); H01L 33/007 (2013.01); H01L 33/32 (2013.01); Y02E 10/544 (2013.01); H01L 2924/0002 (2013.01); H01L 2224/48091 (2013.01); H01L 2924/1461 (2013.01);
Abstract
Thin flat crack-free freestanding nitride layers are fabricated by laser patterning of the interface and/or opposing surface of the nitride layer. The nitride layer is substantially flat once removed from the non-native substrate. The thin flat crack free nitride layers are between 3 and 250 microns thick and can have areas greater than 1 cm.