The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2015

Filed:

Jul. 18, 2012
Applicants:

Masahiro Ogura, Tokyo, JP;

Noriyasu Hasegawa, Utsunomiya, JP;

Yasuyuki Tamura, Yokohama, JP;

Inventors:

Masahiro Ogura, Tokyo, JP;

Noriyasu Hasegawa, Utsunomiya, JP;

Yasuyuki Tamura, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/42 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70758 (2013.01); G03F 7/70858 (2013.01);
Abstract

A positioning apparatus for a moving object includes: a driving unit including a stator and a movable element connected to the moving object via a connecting member; a chassis which includes an opening which allows movement of the connecting member upon driving of the movable element, and an exhaust outlet which includes end exhaust outlets arranged at first and second ends of the driving range of the movable element; an exhaust unit which exhausts a gas in the chassis; and a controller which controls the exhaust unit so that an amount of exhaust from the end exhaust outlet arranged at the first end becomes larger when the movable element is driven toward the first end on a side of the first end of the driving range than when the movable element is positioned at the center of the driving range.


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