The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Aug. 30, 2012
Applicants:
Hyo-jin Yun, Gyeonggi-do, KR;
Sung-gun Shin, Gyeonggi-do, KR;
Hyo-sun Lee, Gyeonggi-do, KR;
Byung-uk Kim, Gyeonggi-do, KR;
Hyun-woo Kim, Gyeonggi-do, KR;
Suk-il Yoon, Gyeonggi-do, KR;
Oh-hwan Kweon, Gyeonggi-do, KR;
Inventors:
Hyo-jin Yun, Gyeonggi-do, KR;
Sung-gun Shin, Gyeonggi-do, KR;
Hyo-sun Lee, Gyeonggi-do, KR;
Byung-uk Kim, Gyeonggi-do, KR;
Hyun-woo Kim, Gyeonggi-do, KR;
Suk-il Yoon, Gyeonggi-do, KR;
Oh-hwan Kweon, Gyeonggi-do, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/168 (2013.01); C11D 11/0047 (2013.01);
Abstract
A thinner composition for a reduced resist coating process includes an alkyl lactate, cyclohexanone, and an alkyl acetate, wherein an alkyl substituent of the alkyl acetate is a C1 to C5 non-ether based alkyl group.