The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Oct. 31, 2012
Applicant:
Matthias Jungbluth, Berlin, DE;
Inventor:
Matthias Jungbluth, Berlin, DE;
Assignee:
SIEMENS AKTIENGESELLSCHAFT, München, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 39/22 (2006.01); G01B 7/34 (2006.01);
U.S. Cl.
CPC ...
G01B 7/34 (2013.01);
Abstract
A method for determining the roughness of an internal surface of a metal substrate or a metal layer is provided. By the correlation of a single destructive measurement in order to determine the roughness and the conductivity measurement of a transition region, the roughness is determined for other samples without destructive measurement.