The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2015

Filed:

Dec. 10, 2012
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Choel-Min Jang, Yongin, KR;

Myung-Soo Huh, Yongin, KR;

Suk-Won Jung, Yongin, KR;

Sung-Yong Lee, Yongin, KR;

Cheol-Rae Jo, Yongin, KR;

In-Kyo Kim, Yongin, KR;

Sung-Hun Key, Yongin, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 3/04 (2006.01); C23C 16/00 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
C23C 16/00 (2013.01); B01F 3/04 (2013.01); C23C 16/4481 (2013.01); C23C 16/4482 (2013.01);
Abstract

A canister includes an accommodation portion for accommodating a liquid material; an outlet pipe that is connected to the accommodation portion so as to discharge a gas material obtained by vaporizing the liquid material; a blocking cover that is connected to an upper surface of the accommodation portion; and a plurality of baffle plates that are disposed in the accommodation portion and are spaced apart from each other. The canister further includes a restrictor including a main body member that is disposed between the plurality of baffle plates and the blocking cover and is connected to an internal surface of the accommodation portion, an extension member extending from the main body member, and a through portion that is formed through the main body member and the extension member. A deposition procedure using the canister is efficiently performed and characteristics of a deposition layer are easily improved.


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