The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Mar. 13, 2013
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Stefano S. Oggioni, Milan, IT;
Michel Despont, Rueschlikon, CH;
Mark Lantz, Rueschlikon, CH;
Thomas Albrecht, San Jose, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05K 3/30 (2006.01); H05K 3/00 (2006.01); H05K 3/20 (2006.01); H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 29/40 (2006.01); B81C 3/00 (2006.01);
U.S. Cl.
CPC ...
H05K 3/301 (2013.01); Y10T 29/49137 (2015.01); B81C 3/005 (2013.01); B81B 2207/012 (2013.01); B81C 2203/054 (2013.01);
Abstract
An improved alignment precision of Micro-Electromechanical Systems (MEMS). A method includes two parts of MEMS separated by at least one rolling element having a first diameter, where the rolling element is maintained on one of the two parts using a thermally dissipative material, horizontally aligning the two parts by pivoting one of the two parts about the rolling element, and locking the two parts together.