The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Apr. 18, 2013
Applicant:

Northrop Grumman Systems Corporation, Falls Church, VA (US);

Inventors:

Patty Chang-Chien, Redondo Beach, CA (US);

Kelly Jill Hennig, Torrance, CA (US);

Xianglin Zeng, Monterey Park, CA (US);

Jeffrey M. Yang, Cerritos, CA (US);

Assignee:

Northrop Grumman Systems Corporation, Falls Church, VA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01T 4/16 (2006.01); H03G 11/00 (2006.01); H01P 1/14 (2006.01); H01L 23/60 (2006.01);
U.S. Cl.
CPC ...
H01T 4/16 (2013.01); H01P 1/14 (2013.01); H03G 11/002 (2013.01); H03G 11/004 (2013.01); H01L 23/60 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A plasma power limiter fabricated using wafer-level fabrication techniques with other circuit elements. The plasma limiter includes a signal substrate and a trigger substrate defining a hermetically sealed cavity therebetween in which is encapsulated an ionizable gas. The signal substrate includes a signal line within the cavity and the trigger substrate includes at least one trigger probe extending from the trigger substrate towards the transmission line. If a signal propagating on the transmission line exceeds a power threshold, the gas within the cavity is ionized creating a conduction path between the transmission line and the trigger probe that draws off the high power current.


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