The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Apr. 25, 2012
Applicants:

Toshinari Noda, Osaka, JP;

Kazuki Komaki, Osaka, JP;

Inventors:

Toshinari Noda, Osaka, JP;

Kazuki Komaki, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/16 (2006.01); H01L 41/047 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
H01L 41/0478 (2013.01); Y10T 29/42 (2015.01); H01L 41/081 (2013.01); H01L 41/0815 (2013.01); H01L 41/318 (2013.01);
Abstract

A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric layer, and an upper electrode layer sequentially formed on the substrate. The substrate has a linear thermal expansion coefficient higher than that of the piezoelectric layer, and the piezoelectric layer includes a polycrystalline body having an in-plane stress in a compressive direction. Thus, the piezoelectric element realizes the piezoelectric layer having a high orientation in a polarization axis direction, high proportionality of a displacement amount with respect to an applied voltage, and a large absolute value of the displacement amount.


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