The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Mar. 08, 2013
Applicant:

Atomic Energy Council-institute of Nuclear Energy Research, Longtan Township, Taoyuan County, TW;

Inventors:

Hwen-Fen Hong, Longtan Township, Taoyuan County, TW;

Hou-Ying Huang, Longtan Township, Taoyuan County, TW;

Hwa-Yuh Shin, Longtan Township, Taoyuan County, TW;

Assignee:

ATOMIC ENERGY COUNCIL-INSTITUTE OF NUCLEAR ENERGY RESEARCH, Longtan Township, Taoyuan County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/20 (2006.01); H01L 21/36 (2006.01); H01L 31/18 (2006.01); H01L 21/02 (2006.01); H01L 31/032 (2006.01); C23C 16/30 (2006.01); C23C 16/448 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1864 (2013.01); H01L 21/02557 (2013.01); H01L 21/02568 (2013.01); H01L 21/0262 (2013.01); H01L 31/0322 (2013.01); H01L 31/0326 (2013.01); Y02E 10/541 (2013.01); C23C 16/305 (2013.01); C23C 16/4481 (2013.01); C23C 16/56 (2013.01);
Abstract

A method for manufacturing an absorber layer of thin film solar cells is revealed. Firstly vapors of different metal-organic sources are generated in a plurality of containers used for mounting different metal-organic sources. Then the vapors of the metal-organic sources are mixed with a carrier gas and are filled into a reaction together with a reaction gas chamber through pipelines. Next the metals and the compounds are deposited on a substrate in the reaction chamber to form an absorber layer of a thin film solar cell. A flow rate of each metalorganic vapors filled into the reaction chamber is controlled by a mass flow controller respectively.


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