The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Nov. 21, 2011
Applicants:

Andreas Fischer, Stockholm, SE;

Göran Stemme, Lindingo, SE;

Frank Niklaus, Taby, SE;

Inventors:

Andreas Fischer, Stockholm, SE;

Göran Stemme, Lindingo, SE;

Frank Niklaus, Taby, SE;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/48 (2006.01); H01L 23/48 (2006.01); H01L 23/14 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76879 (2013.01); H01L 21/486 (2013.01); H01L 21/76898 (2013.01); H01L 23/147 (2013.01); H01L 23/481 (2013.01); H01L 23/49866 (2013.01); H01L 2924/09701 (2013.01); H01L 2224/131 (2013.01); H01L 2924/0001 (2013.01); H01L 2924/1461 (2013.01);
Abstract

A method is disclosed for forming conductive vias in a substrate by filling preformed via holes, preferably through via holes, with conductive material. The method includes providing a plurality of preformed objects at least partly including ferromagnetic material on a surface of the substrate; providing a magnetic source on an opposite side of the substrate with respect to the plurality of preformed objects, thereby at least partly aligning at least a portion of the preformed objects with a magnetic field associated with the magnetic source; and moving the magnetic source relative the substrate, or vice versa, thereby moving the at least portion of the preformed objects into at least a portion of the via holes.


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