The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Feb. 20, 2014
Applicant:

SK Hynix Inc., Gyeonggi-do, KR;

Inventors:

Jin-Ku Lee, Gyeonggi-do, KR;

Jae-Geun Oh, Gyeonggi-do, KR;

Young-Ho Lee, Gyeonggi-do, KR;

Mi-Ri Lee, Gyeonggi-do, KR;

Seung-Beom Baek, Gyeonggi-do, KR;

Assignee:

SK Hynix Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66575 (2013.01); H01L 21/306 (2013.01);
Abstract

A doping method that forms a doped region at a desired location of a three-dimensional (3D) conductive structure, controls the doping depth and doping dose of the doped region relatively easily, has a shallow doping depth, and prevents a floating body effect. A semiconductor device is fabricated using the same doping method. The method includes, forming a conductive structure having a sidewall, exposing a portion of the sidewall of the conductive structure, and forming a doped region in the exposed portion of the sidewall by performing a plasma doping process.


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