The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Nov. 21, 2012
Infineon Technologies Austria Ag, Villach, AT;
Kurt Sorschag, Villach-Landskron, AT;
Infineon Technologies Austria AG, Villach, AT;
Abstract
A method for producing a semiconductor device is provided. The method includes: providing a wafer including an upper surface and a plurality of semiconductor mesas extending to the upper surface; forming a first support structure made of a first material and adjoining the plurality of semiconductor mesas at the upper surface so that adjacent pairs of the plurality of semiconductor mesas are bridged by the first support structure; forming a second support structure made of a second material different from the first material and adjoining the plurality of semiconductor mesas at the upper surface so that the adjacent pairs of the plurality of semiconductor mesas are bridged by the second support structure; removing the first support structure; and at least partly removing the second support structure.