The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Mar. 21, 2012
Applicants:

Arne Fleissner, Regensburg, DE;

Surama Malik, Cambridge, GB;

Colin Baker, Willingham, GB;

Laurence Scullion, Great Cambourne, GB;

Jeremy Burroughes, Cambridge, GB;

Inventors:

Arne Fleissner, Regensburg, DE;

Surama Malik, Cambridge, GB;

Colin Baker, Willingham, GB;

Laurence Scullion, Great Cambourne, GB;

Jeremy Burroughes, Cambridge, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 21/306 (2006.01); G03F 7/20 (2006.01); H01L 51/00 (2006.01); H01L 51/52 (2006.01); H01L 29/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/306 (2013.01); G03F 7/2022 (2013.01); H01L 51/0003 (2013.01); H01L 51/0018 (2013.01); H01L 51/5212 (2013.01); H01L 2251/5361 (2013.01); H01L 2251/5392 (2013.01); Y02E 10/549 (2013.01); H01L 29/02 (2013.01); H01L 51/0001 (2013.01); H01L 51/0096 (2013.01);
Abstract

This invention generally relates to planarisation of a surface of a substrate. In an embodiment of planarising a surface region of a substrate, the substrate having a body on a portion of said surface region, the method comprises: modifying the wetability of a surface of said body with respect to a liquid planariser composition by providing a surface modifying layer such as a self-assembled monolayer thereon; and then depositing the liquid planariser composition on said substrate and said body such that the planariser composition wets said surface region, wherein said surface modifying layer determines a contact angle of said liquid planariser composition to said surface of said body such that the deposited liquid planariser composition is repelled from said surface of said body.


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