The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Apr. 30, 2012
Applicants:

Hiroshi Naito, Aira-Gun, JP;

Hideki Sato, Hamamatsu, JP;

Yukio Wakui, Iwata, JP;

Masayoshi Omura, Hamamatsu, JP;

Inventors:

Hiroshi Naito, Aira-Gun, JP;

Hideki Sato, Hamamatsu, JP;

Yukio Wakui, Iwata, JP;

Masayoshi Omura, Hamamatsu, JP;

Assignee:

Yamaha Corporation, Hamamatsu-Shi, Shizuoka-Ken, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/09 (2006.01); H01L 21/00 (2006.01); H01L 27/22 (2006.01); B82Y 25/00 (2011.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
H01L 27/22 (2013.01); B82Y 25/00 (2013.01); G01R 33/09 (2013.01); G01R 33/093 (2013.01); H01L 43/12 (2013.01);
Abstract

A magnetic sensor for detecting the intensity of a magnetic field in three axial directions, in which a plurality of giant magnetoresistive elements are formed on a single semiconductor substrate. A thick film is formed on the semiconductor substrate; giant magnetoresistive elements forming X-axis and Y-axis sensors are formed on a planar surface thereof; and giant magnetoresistive elements forming a Z-axis sensor are formed using slopes of channels in the thick film. Each of the slopes of the channels can be constituted of a first slope and a second slope, so that a magneto-sensitive element is formed on the second slope having a larger inclination angle. In order to optimize the slope shape and inclination with respect to each channel, it is possible to form a dummy slope that does not directly relate to the formation of the giant magnetoresistive elements.


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