The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Jul. 29, 2011
Applicants:
Takanobu Miyashita, Tsukuba, JP;
Yasuyuki Goto, Tsukuba, JP;
Inventors:
Takanobu Miyashita, Tsukuba, JP;
Yasuyuki Goto, Tsukuba, JP;
Assignee:
TANAKA KIKINZOKU KOGYO K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); B22F 3/12 (2006.01); B22F 1/02 (2006.01); C22C 19/05 (2006.01); C22C 19/07 (2006.01); C22C 38/30 (2006.01); C22C 32/00 (2006.01); C22C 1/04 (2006.01); G11B 5/851 (2006.01); H01F 41/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3426 (2013.01); B22F 3/12 (2013.01); C22C 19/05 (2013.01); C22C 38/30 (2013.01); C22C 1/0433 (2013.01); C22C 19/07 (2013.01); C22C 32/0026 (2013.01); C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01F 41/183 (2013.01); C23C 14/3407 (2013.01); B22F 1/02 (2013.01); C22C 2202/02 (2013.01);
Abstract
A magnetron sputtering target containing a ferromagnetic metal element includes a magnetic phase containing the ferromagnetic metal element; a plurality of non-magnetic phases containing the ferromagnetic metal element, the plurality of non-magnetic phases containing a different constituent element from each other or containing constituent elements at different ratios from each other; and an oxide phase. Regions of the magnetic phase and the plurality of non-magnetic phases are separated from each other by the oxide phase.