The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Oct. 01, 2012
Applicant:

Hitachi Chemical Company, Ltd., Tokyo, JP;

Inventors:

Hiroshi Yamazaki, Hitachi, JP;

Yoshimi Igarashi, Hitachi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 3/06 (2006.01); G03F 7/00 (2006.01); G03F 7/027 (2006.01); G03F 7/09 (2006.01); G03F 7/095 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0005 (2013.01); H05K 3/06 (2013.01); G03F 7/027 (2013.01); G03F 7/092 (2013.01); G03F 7/095 (2013.01); G03F 7/0952 (2013.01); G03F 7/0955 (2013.01); G03F 7/2022 (2013.01);
Abstract

A conductive pattern formation method of the present invention includes a first exposure step of radiating active light in a patterned manner to a photosensitive layer including a photosensitive resin layer provided on a substrate and a conductive film provided on a surface of the photosensitive resin layer on a side opposite to the substrate; a second exposure step of radiating active light, in the presence of oxygen, to some or all of the portions of the photosensitive layer not exposed at least in the first exposure step; and a development step of developing the photosensitive layer to form a conductive pattern following the second exposure step.


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