The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Feb. 12, 2013
Ju-ai Ruan, Plano, TX (US);
Ju-Ai Ruan, Plano, TX (US);
Other;
Abstract
A novel method of modulating the motion or displacement of function units in MEMS (micro-electro-mechanical-system) devices (or MEMS motion transducers) is described. This method generates small vertical displacement of one MEMS component (activation component) in the device and effectively translates that displacement into the displacement of another MEMS component (function unit) in the same device in an in-plan direction that is perpendicular to the direction of the vertical displacement of activation component. The activation component has a large surface area of electrostatic interaction with its interacting electrode, capable of generating large activation force at small voltages. Therefore this method makes it effective to modulate the motion or displacement of the function unit of MEMS motion transducers in an in-plan direction at low voltages. Specific designs of MEMS motion transducers employing this method are disclosed.