The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Nov. 18, 2013
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Terence Lawrence Kane, Wappinger Falls, NY (US);
Richard Walter Oldrey, Clintondale, NY (US);
Michael P. Tenney, Hopewell Junction, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 30/12 (2010.01); G01Q 70/02 (2010.01); G01D 3/08 (2006.01); G01D 18/00 (2006.01); G01D 11/30 (2006.01); G02B 21/34 (2006.01); G02B 27/00 (2006.01); G01F 25/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01Q 30/12 (2013.01); G01Q 70/02 (2013.01); G01D 3/08 (2013.01); G01D 18/00 (2013.01); G01D 11/30 (2013.01); G01R 31/286 (2013.01); G02B 21/34 (2013.01); G02B 27/0006 (2013.01); G01F 25/0007 (2013.01);
Abstract
An apparatus for electrical inspection is disclosed. The apparatus comprises an inert gas delivery system that delivers inert gas near a microscope imaging element and electrical test probes. A gas supply provides an inert gas such as argon or nitrogen. The inert gas displaces oxygen to prevent premature oxidation of the test probes. In one embodiment, one or more delivery tubes deliver inert gas to the measurement area.