The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
May. 25, 2012
Luca Coronato, Corsico, IT;
Gabriele Cazzaniga, Rosate, IT;
Carlo Caminada, Pregnana Milanese, IT;
Manuel Santoro, Milan, IT;
Luciano Prandi, Belinzago Novarse, IT;
Demetre Kondylis, Saratoga, CA (US);
Luca Coronato, Corsico, IT;
Gabriele Cazzaniga, Rosate, IT;
Carlo Caminada, Pregnana Milanese, IT;
Manuel Santoro, Milan, IT;
Luciano Prandi, Belinzago Novarse, IT;
Demetre Kondylis, Saratoga, CA (US);
Maxim Integrated Products, Inc., San Jose, CA (US);
Abstract
Disclosed are a MEMS sensor and methods to compensate a quadrature error on the sensor. The sensor detects movements of a substrate, especially accelerations and rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by drive electrodes. The mass executes a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass occurring due to Coriolis force and quadrature error is detected with detection electrodes. A capacitance change is detected as a function of drive movement of the mass by using compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.