The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
May. 31, 2012
Chih-wei Huang, Taipei, TW;
Chieh-pin Chang, Taipei, TW;
Ja-hao Chen, Taipei, TW;
Chuan-jane Chao, Hsinchu, TW;
Ying-zong Juang, Taipei, TW;
Shyh-chyi Wong, Taipei, TW;
Yeong-her Wang, Taipei, TW;
Chih-Wei Huang, Taipei, TW;
Chieh-Pin Chang, Taipei, TW;
Ja-Hao Chen, Taipei, TW;
Chuan-Jane Chao, Hsinchu, TW;
Ying-Zong Juang, Taipei, TW;
Shyh-Chyi Wong, Taipei, TW;
Yeong-Her Wang, Taipei, TW;
RichWave Technology Corp., NeiHu District, Taipei, TW;
Abstract
A pizeoresistive type Z-axis accelerometer is provided, including a substrate; a plurality of anchors formed over the substrate; a plurality of cantilever beams, wherein the cantilever beams include a piezoresistive material; and a proof mass, wherein the proof mass is suspended over the substrate by respectively connecting the proof mass with the anchors, and the accelerometer senses a movement of the proof mass by the piezoresistive material.