The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9052267 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 09, 2015

Filed:

Oct. 14, 2014
Applicant:

Nxp B.v., Eindhoven, NL;

Inventors:

Youri Victorovitch Ponomarev, Lueven, BE;

David Tio Castro, Oud Heverlee, BE;

Roel Daamen, Herkenbosch, NL;

Assignee:

NXP, B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); G01N 27/04 (2006.01); G01N 27/12 (2006.01); G01N 27/22 (2006.01); H01L 51/00 (2006.01); H01L 51/42 (2006.01); G01N 33/00 (2006.01); H01L 27/144 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
G01N 27/048 (2013.01); G01N 27/121 (2013.01); G01N 27/223 (2013.01); H01L 51/0034 (2013.01); H01L 51/42 (2013.01); G01N 33/0036 (2013.01); H01L 27/144 (2013.01); H01L 31/18 (2013.01);
Abstract

Disclosed is an integrated circuit comprising a substrate () including at least one light sensor (); an interconnect structure () over the substrate; at least one passivation layer () over the interconnect structure, said passivation layer including a first area over the at least one light sensor; and a gas sensor such as a moisture sensor () at least partially on a further area of the at least one passivation layer, wherein the gas sensor comprises a gas sensitive layer (') in between a first electrode () and a second electrode (), the gas sensitive layer further comprising a portion (″) over the first area. A method of manufacturing such an IC is also disclosed.


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