The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Feb. 07, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
Yuya Nishikawa, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, , JP;
Abstract
A measurement apparatus includes: a vibration detection surface which has a set relative position with respect to a test surface, and is irradiated with a part of the measurement light; an image sensor configured to sense, together with a first interference fringe generated by interference between reference light from a reference surface and measurement light from the test surface, a second interference fringe generated by interference between light from the vibration detection surface and the reference light; and a processor configured to obtain a relative vibration between the reference surface and the test surface by using data of the sensed second interference fringe, and obtain the shape of the test surface by using the obtained relative vibration and data of the sensed first interference fringe.