The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Jul. 02, 2009
Applicants:
Won-woong Jung, Suwon-si, KR;
Hyun-cheul Shin, Suwon-si, KR;
Inventors:
Won-Woong Jung, Suwon-si, KR;
Hyun-Cheul Shin, Suwon-si, KR;
Assignee:
Samsung Display Co., Ltd., Giheung-Gu, Yongin, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/324 (2006.01); F27B 17/00 (2006.01); F27B 5/04 (2006.01); F27B 5/14 (2006.01); F27D 5/00 (2006.01);
U.S. Cl.
CPC ...
F27B 17/0016 (2013.01); F27B 5/04 (2013.01); F27B 5/14 (2013.01); F27D 5/00 (2013.01);
Abstract
A substrate firing device having an increased contact area between the substrate and substrate support portions, thereby preventing the substrate support portions from generating scratches on the substrate when the substrate expands and contracts due to heating and cooling. By increasing the contact area to the substrate and by using quartz on items that contact the substrate, it is possible to prevent scratches occurring on a substrate, even after an etching process of the substrate, thereby improving quality of the slimmer final product.