The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Apr. 30, 2012
Applicants:
Chao-ta Huang, Hsinchu, TW;
Yu-wen Hsu, Tainan, TW;
Chin-fu Kuo, Tainan, TW;
Inventors:
Assignee:
Industrial Technology Research Institute, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); H01L 21/76 (2006.01); B81B 7/00 (2006.01); G01R 33/028 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0006 (2013.01); G01R 33/0286 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/042 (2013.01); B81B 2203/058 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/0154 (2013.01);
Abstract
A microelectromechanical system device including anchors and mass is provided. Electrical interconnections are formed on the mass by using a insulation layer of mass, an electrical insulation trench and conductive through hole. The electrical interconnections replace the cross-line structure without adding additional processing steps, thereby reducing the use of the conductive layer and the electrical insulation layer. A method for fabricating the microelectromechanical system device is also provided.