The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Oct. 02, 2013
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Tae-Hun Lee, Yongin, KR;
Byoung-Seong Jeong, Yongin, KR;
Sang-Su Kim, Yongin, KR;
Eun-Gook Sung, Yongin, KR;
Sung-Hwan Kim, Yongin, KR;
Sung-Won Yang, Yongin, KR;
Je-Hyun Song, Yongin, KR;
Tae-Hyung Kim, Yongin, KR;
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Abstract
A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit to which a substrate is detachably fixed. A conveyer unit conveys the moving unit in a first direction or in an opposite direction to the first direction. A deposition unit includes at least one deposition assembly for depositing a deposition material on the substrate. A discharge data acquisition unit acquires data associated with the amount of the deposition material discharged per unit time from the at least one deposition assembly. A transmission unit transmits the data acquired by the discharge data acquisition unit.