The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2015

Filed:

Dec. 19, 2011
Applicants:

Seon-il Kim, Seoul, KR;

Shin-il Choi, Hwaseong-si, KR;

Ji-young Park, Hwaseong-si, KR;

Sang-gab Kim, Seoul, KR;

O-byoung Kwon, Wanju-gun, KR;

Dong-ki Kim, Cheongju-si, KR;

Sang-tae Kim, Iksan-si, KR;

Young-chul Park, Iksan-si, KR;

In-ho Yu, Iksan-si, KR;

Young-jin Yoon, Jeonju-si, KR;

Suck-jun Lee, Jeonju-si, KR;

Joon-woo Lee, Jeonju-si, KR;

Min-ki Lim, Iksan-si, KR;

Sang-hoon Jang, Jeonju-si, KR;

Young-jun Jin, Iksan-si, KR;

Inventors:

Seon-Il Kim, Seoul, KR;

Shin-Il Choi, Hwaseong-si, KR;

Ji-Young Park, Hwaseong-si, KR;

Sang-Gab Kim, Seoul, KR;

O-Byoung Kwon, Wanju-gun, KR;

Dong-Ki Kim, Cheongju-si, KR;

Sang-Tae Kim, Iksan-si, KR;

Young-Chul Park, Iksan-si, KR;

In-Ho Yu, Iksan-si, KR;

Young-Jin Yoon, Jeonju-si, KR;

Suck-Jun Lee, Jeonju-si, KR;

Joon-Woo Lee, Jeonju-si, KR;

Min-Ki Lim, Iksan-si, KR;

Sang-Hoon Jang, Jeonju-si, KR;

Young-Jun Jin, Iksan-si, KR;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0023 (2013.01); H01L 2251/308 (2013.01);
Abstract

Exemplary embodiments of the present invention disclose a non-halogenated etchant for etching an indium oxide layer and a method of manufacturing a display substrate using the non-halogenated etchant, the non-halogenated etchant including nitric acid, sulfuric acid, a corrosion inhibitor including ammonium, a cyclic amine-based compound, and water.


Find Patent Forward Citations

Loading…