The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Jun. 13, 2013
Applicant:
Tsmc Solar Ltd., Taichung, TW;
Inventors:
Chung-Hsien Wu, Luzhu Township, TW;
Chi-Yu Chiang, Taoyuan, TW;
Shih-Wei Chen, Kaohsiung, TW;
Wen-Tsai Yen, Caotun Township, TW;
Assignee:
TSMC Solar Ltd., Taichung, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 31/18 (2006.01); H01L 31/032 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); H01L 31/0322 (2013.01); H01L 22/12 (2013.01);
Abstract
An evaporation apparatus comprises a chamber configured to contain at least one dispensing nozzle and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one dispensing nozzle and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape. The at least one adjustable shielding member has a heater.