The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2015

Filed:

Feb. 16, 2011
Applicants:

Stephen Maldonado, Ann Arbor, MI (US);

Jhindan Mukherjee, Ann Arbor, MI (US);

Inventors:

Stephen Maldonado, Ann Arbor, MI (US);

Jhindan Mukherjee, Ann Arbor, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/00 (2006.01); C23C 20/00 (2006.01); C23C 24/00 (2006.01); H01L 21/306 (2006.01); C23C 22/05 (2006.01); C23C 18/18 (2006.01); C30B 29/40 (2006.01); C30B 33/00 (2006.01); C23C 22/17 (2006.01); C23C 18/20 (2006.01); C23C 22/14 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/306 (2013.01); C23C 22/05 (2013.01); C23C 18/18 (2013.01); C23C 22/17 (2013.01); C23C 18/2046 (2013.01); C23C 22/14 (2013.01); C30B 29/406 (2013.01); C30B 33/00 (2013.01); H01L 21/02538 (2013.01); H01L 21/02664 (2013.01);
Abstract

This invention provides a semiconductor having a functionalized surface that is resistant to oxidation and that includes a plurality of atoms of a Group III element bonded to organic groups. The functionalized surface has less than or equal to about 1 atom of the Group III element bonded to an oxygen atom per every 1,000 atoms of the Group III element bonded to the organic groups, as determined using X-ray photoelectron spectroscopy. This invention also provides a method of functionalizing the surface and includes the step of halogenating at least one of the plurality of atoms of the Group III element to form halogenated Group III element atoms. The method also includes the step of reacting at least one of the halogenated Group III element atoms with a Grignard reagent to form a bond between the at least one Group III element atom and the organic groups.


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