The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Mar. 05, 2012
Muhammad A. Hawwa, Dhahran, SA;
Kamal Youcef-toumi, Cambridge, MA (US);
Hussain Al-qahtani, Dhahran, SA;
Muhammad A. Hawwa, Dhahran, SA;
Kamal Youcef-Toumi, Cambridge, MA (US);
Hussain Al-Qahtani, Dhahran, SA;
Massachusetts Institute of Technology, Cambridge, MA (US);
King Fahd University of Petroleum and Minerals, Dhahran, SA;
Abstract
Pressure sensor. The sensor includes a deformable diaphragm responsive to applied pressure and a rigid beam mounted to move as the diaphragm deforms. The rigid beam includes a mirrored surface for receiving light from and reflecting light into an optical fiber thereby forming a Fabry-Perot cavity to detect changes in the position of the rigid beam. The rigid beam further includes inter-digital fingers extending from the mirrored surface and moving with the rigid beam with respect to fixed inter-digital fingers to create a change in electrical charges in the fingers to detect changes in the position of the rigid beam thereby providing two measures of rigid beam displacement which are measures of pressure. In a preferred embodiment, the optical fiber is a single mode optical fiber.