The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Sep. 25, 2006
Applicants:
Marilena Radoiu, Lyons, FR;
James Robert Smith, Taunton, GB;
Andrew James Seeley, Bristol, GB;
Inventors:
Assignee:
Edwards Limited, West Sussex, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/32 (2006.01); B01J 19/12 (2006.01); B01D 53/00 (2006.01);
U.S. Cl.
CPC ...
B01D 53/32 (2013.01); B01J 19/126 (2013.01); B01D 53/007 (2013.01); B01D 2259/806 (2013.01); B01D 2259/818 (2013.01);
Abstract
In a method of operating a microwave plasma abatement apparatus comprising a microwave generator, and a gas chamber for receiving microwave energy from the microwave generator and within which a plasma is generated using the microwave energy, the amount of microwave energy that is not absorbed within the gas chamber is monitored, and the power of the microwave energy generated by the microwave generator is adjusted in dependence on the monitored microwave energy.