The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Apr. 14, 2011
Yoshiyuki Nakazawa, Kyoto, JP;
Yoshio Furuya, Kyoto, JP;
Ryosuke Ito, Kyoto, JP;
Kenji Nakanishi, Kyoto, JP;
Kazutaka Taniguchi, Kyoto, JP;
Ryo Yamada, Kyoto, JP;
Yoshiyuki Nakazawa, Kyoto, JP;
Yoshio Furuya, Kyoto, JP;
Ryosuke Ito, Kyoto, JP;
Kenji Nakanishi, Kyoto, JP;
Kazutaka Taniguchi, Kyoto, JP;
Ryo Yamada, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., , JP;
Abstract
A drawing device draws a pattern on a substrate by radiating light from an optical head part on a target object (for example, substrate) which relatively moves with respect to the optical head part. Here, the optical head part has a spatial modulating unit which spatially modulates light from a light source, based on pattern data, and an optical path corrector which shifts the route of light spatially modulated in the spatial modulating unit at precision subdivided more than units of spatial modulation in the spatial modulating unit (more specifically, for example, units of pixels of spatial light modulator).