The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

Aug. 09, 2013
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Zheng Liu, Beijing, CN;

Chunping Long, Beijing, CN;

Pil Seok Kim, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); H01L 21/336 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78669 (2013.01); H01L 29/66765 (2013.01); H01L 29/66757 (2013.01);
Abstract

The disclosure discloses a thin film transistor and a manufacturing method thereof, an array substrate, and a display device, which can manufacture a thin film transistor with lower contents of impurity at a low temperature. The thin film transistor comprises: a substrate, and an active layer disposed on the substrate, the active layer comprising a source region, a drain region and a channel region, wherein the active layer is formed by depositing an inducing metal on an amorphous silicon layer on the substrate by an atomic layer deposition (ALD) method and then conducting heat treatment on the amorphous silicon layer deposited with the inducing metal so that metal induction crystallization and metal induction lateral crystallization take place in the amorphous silicon layer.


Find Patent Forward Citations

Liu, Zheng. (2015). Thin film transistor and manufacturing method thereof, and array substrate (U.S. Patent No. 9040988). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9040988

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…