The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Mar. 06, 2012
Il-young Han, Uiwang-si, KR;
Jae-sung Kwon, Yongin-si, KR;
Sang-wook Park, Hwaseong-si, KR;
Won-keun Kim, Hwaseong-si, KR;
Il-Young Han, Uiwang-si, KR;
Jae-Sung Kwon, Yongin-si, KR;
Sang-Wook Park, Hwaseong-si, KR;
Won-Keun Kim, Hwaseong-si, KR;
Abstract
An apparatus for fabricating semiconductor devices includes a chamber having a bottom plane, a side wall and a lid. An irradiating unit is at an interior of the chamber. A substrate mounting unit is between the bottom plane of the chamber and the irradiating unit. The irradiating unit includes an irradiating tube and a hole penetrating the central region of the irradiating tube. The irradiating tube has a hollow disk shape, and a lower surface of the irradiating tube is opened to the substrate mounting unit.