The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

Mar. 13, 2013
Applicants:

Bradford B. Pate, Arlington, VA (US);

Matthew P. Ray, Rock Hill, SC (US);

Jeffrey W. Baldwin, Fairfax, VA (US);

Inventors:

Bradford B. Pate, Arlington, VA (US);

Matthew P. Ray, Rock Hill, SC (US);

Jeffrey W. Baldwin, Fairfax, VA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H05K 3/46 (2006.01); B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/36 (2014.01); B23K 26/40 (2014.01); H01L 23/373 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
H05K 3/4602 (2013.01); H01L 23/3732 (2013.01); H01L 2924/00 (2013.01); H01L 2924/0002 (2013.01); H05K 3/0029 (2013.01); B23K 26/0057 (2013.01); B23K 26/063 (2013.01); B23K 26/365 (2013.01); B23K 26/407 (2013.01); B23K 2201/38 (2013.01); B23K 2201/40 (2013.01); Y10S 438/931 (2013.01);
Abstract

A method of laser ablation for electrical contact to a buried electrically conducting layer in diamond comprising polishing a single crystal diamond substrate having a first carbon surface, implanting the diamond with a beam of 180 KeV followed by 150 KeV Cions at fluencies of 4×10ions/cmand 5×10ions/cmrespectively, forming an electrically conducting carbon layer beneath the first carbon surface, and ablating the single crystal diamond which lies between the electrically conducting layer and the first carbon surface.


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