The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Jan. 31, 2011
Applicants:
Andrew Sparks, Cambridge, MA (US);
William D. Sawyer, Arlington, MA (US);
Inventors:
Andrew Sparks, Cambridge, MA (US);
William D. Sawyer, Arlington, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/02 (2006.01); G01N 29/036 (2006.01); H03H 9/10 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
G01N 29/022 (2013.01); G01N 29/036 (2013.01); G01N 2291/02818 (2013.01); G01N 2291/0427 (2013.01); H03H 9/1057 (2013.01); H03H 2009/02503 (2013.01);
Abstract
A MEMS sensor includes at least one closed nodal anchor along a predetermined closed nodal path on at least one surface of a resonant mass. The resonant mass may be configured to resonate substantially in an in-plane contour mode. Drive and/or sense electrodes may be disposed within a cavity formed at least in part by the resonant mass, the closed nodal anchor, and a substrate.