The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

Sep. 10, 2009
Applicants:

Sébastien Donet, Meaudre, FR;

Lionel Filhol, Saint Sauveur, FR;

Stéphanie Thollon, Salles, FR;

Inventors:

Sébastien Donet, Meaudre, FR;

Lionel Filhol, Saint Sauveur, FR;

Stéphanie Thollon, Salles, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/442 (2006.01); C23C 16/44 (2006.01); B01J 23/42 (2006.01); B01J 35/00 (2006.01); B01J 37/02 (2006.01); C01B 3/00 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/442 (2013.01); C23C 16/4417 (2013.01); B01J 23/42 (2013.01); B01J 35/006 (2013.01); B01J 37/0221 (2013.01); B01J 37/0238 (2013.01); B22F 2998/00 (2013.01); C01B 3/0026 (2013.01); C23C 16/45502 (2013.01); C23C 16/45591 (2013.01); Y02E 60/327 (2013.01); Y10S 118/05 (2013.01);
Abstract

A device for vapor deposition of chemical species on support grains of spherical or similar shape disposed in a fluidized bed. The device includes a first chamber including a fluidized bed in which a funnel-shaped fluidizer element is housed to receive support grains of spherical or similar shape; a second chamber in fluid flow connection with the first chamber to deliver precursors in a vapor phase of chemical species to be deposited on the support grains and to convey a fluidizing gas towards the first chamber; and a flute at an inlet to the fluidizer element to control distribution of the vapor phase precursors and the fluidizing gas within the fluidizer element. The distributor flute includes one or more outer grooves, each groove including a first portion oriented along the longitudinal axis of the flute and a second portion winding helically around the axis to generate a fluidizing gas vortex within the first chamber.


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