The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
Sep. 24, 2009
Eigo Kawakami, Utsunomiya, JP;
Shingo Okushima, Kawasaki, JP;
Hideki Ina, Tokyo, JP;
Junichi Seki, Yokohama, JP;
Atsunori Terasaki, Kawasaki, JP;
Motoki Okinaka, Inagi, JP;
Eigo Kawakami, Utsunomiya, JP;
Shingo Okushima, Kawasaki, JP;
Hideki Ina, Tokyo, JP;
Junichi Seki, Yokohama, JP;
Atsunori Terasaki, Kawasaki, JP;
Motoki Okinaka, Inagi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
There is provided an imprinting apparatus that transfers a pattern of a mold to a resin on a substrate, the imprinting apparatus including a deposition mechanism configured to deposit the resin onto the substrate; a first driving mechanism configured to change a relative position, on a plane parallel to the surface of the substrate, of the substrate and the mold; a second driving mechanism configured to change the relative position, on a plane parallel to the surface of the substrate, of the substrate and the deposition mechanism; and a control unit configured to control the deposition mechanism and the driving mechanism so as to perform a resin deposition process of depositing the resin onto the substrate and an imprint process of transferring the pattern of the mold to the resin on the substrate in parallel.