The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

Nov. 01, 2012
Applicant:

Stichting Imec Nederland, Eindhoven, NL;

Inventors:

Peter Offermans, Eindhoven, NL;

Roman Vitushinsky, Vaals, NL;

Mercedes Crego Calama, Geldrop-Mierlo, NL;

Sywert Brongersma, Eindhoven, NL;

Assignee:

Stichting IMEC Nederland, Eindhoven, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/04 (2006.01); G01N 27/12 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/128 (2013.01); G01N 33/0009 (2013.01); G01N 27/129 (2013.01);
Abstract

The application describes methods and apparatus for chemical sensing, e.g. gas sensing, which have high sensitivity but low power operation. A sensor is described having a flexible membrane comprising a III/N heterojunction structure configured so as to form a two dimensional electron gas within said structure. A sensing material is disposed on at least part of the flexible membrane, the sensing material being sensitive to one or more target chemicals so as to undergo a change in physical properties in the presence of said one or more target chemicals. The sensing material is coupled to said heterojunction structure such that said change in physical properties of the sensing material imparts a change in stress within the heterojunction structure which modulates the resistivity of the two dimensional electron gas.


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