The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Dec. 27, 2012
Applicant:
Micralyne Inc., Edmonton, CA;
Inventors:
Assignee:
Micralyne Inc., Edmonton, CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 3/00 (2006.01); H02N 1/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0841 (2013.01); B81B 3/0062 (2013.01); B81B 3/0086 (2013.01); B81B 2201/042 (2013.01); B81B 2203/04 (2013.01); B81B 2203/058 (2013.01); B81B 2207/07 (2013.01); H02N 1/006 (2013.01);
Abstract
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.