The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Mar. 16, 2013
Advanced Numicro Systems, Inc., San Jose, CA (US);
Yee-Chung Fu, Fremont, CA (US);
Advanced NuMicro Systems, Inc., San Jose, CA (US);
Abstract
A micro-electromechanical systems (MEMS) magnetometer includes first fixed electrodes, second fixed electrodes, a mobile element to rotate about a first rotation axis along a first direction and translate along a second direction orthogonal to the first direction, mobile electrodes extending from the first mobile element and being interdigitated with the first fixed electrodes to form first sensor assemblies, a rotation element coupled to the mobile element to rotate about a second rotation axis along the second direction, the rotation element having a surface opposite the second fixed electrodes to form second sensor assemblies, the second fixed electrode being displaced from the surface of the rotation element along a third direction, and a trace having sections along the first direction and offset from the first rotation axis and along the second direction and offset from the second rotation axis.