The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Jul. 31, 2012
Applicants:
Masanori Ueda, Tokyo, JP;
Shinji Taniguchi, Tokyo, JP;
Tokihiro Nishihara, Tokyo, JP;
Inventors:
Assignee:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H03H 3/04 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); Y10T 29/42 (2015.01); H03H 9/171 (2013.01); H03H 2003/021 (2013.01); H03H 2003/023 (2013.01); H03H 2003/025 (2013.01); H03H 2003/0407 (2013.01);
Abstract
A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.