The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2015

Filed:

Jun. 04, 2013
Applicant:

Stichting Imec Nederland, Eindhoven, NL;

Inventors:

Peter Offermans, Eindhoven, NL;

Roman Vitushinsky, Vaals, NL;

Mercedes Crego Calama, Geldrop-Mierlo, NL;

Sywert Brongersma, Eindhoven, NL;

Assignee:

Stichting IMEC Nederland, Eindhoven, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/403 (2006.01); H01L 29/15 (2006.01); H01L 29/66 (2006.01); H01L 21/00 (2006.01); G01N 27/414 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4146 (2013.01); G01N 27/4143 (2013.01);
Abstract

A Sensor for sensing the presence of at least one fluidum in a space adjoining the sensor is disclosed. In one aspect, the sensor has a two-dimensional electron gas (2DEG) layer stack, a gate electrode overlaying at least part of the 2DEG layer stack for electrostatically controlling electron density of a 2DEG in the 2DEG layer stack and a source and a drain electrode contacting the 2DEG layer stack for electrically contacting the 2DEG, wherein a detection opening is provided in between the gate electrode and the 2DEG layer stack and wherein the detection opening communicates with the space through a detection opening inlet such that molecules of the fluidum can move from the adjoining space through the detection opening inlet into the detection opening where they can measurably alter a electric characteristic of the 2DEG.


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